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Submitted on: 16 December 2008.
Revised on: 15 April 2009.
Accepted on: 01 June 2009.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 04 January 2018.
Revised on: 01 March 2018.
Accepted on: 24 March 2018.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 26 August 2000.
Revised on: 30 November 2000.
Accepted on: 27 December 2000.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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