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Submitted on: 26 May 2008.
Revised on: 21 June 2008.
Accepted on: 13 July 2008.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 05 July 2001.
Revised on: 31 October 2001.
Accepted on: 18 December 2001.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 07 November 2004.
Revised on: 06 March 2005.
Accepted on: 11 April 2005.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 22 February 2000.
Revised on: 11 April 2000.
Accepted on: 20 May 2000.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 28 September 2001.
Revised on: 30 December 2001.
Accepted on: 14 January 2002.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING