http://reply.papertrans.cn/2/181/18050/18050-21.png
Submitted on: 04 June 2014.
Revised on: 13 July 2014.
Accepted on: 10 September 2014.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 25 June 2014.
Revised on: 05 September 2014.
Accepted on: 04 October 2014.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 11 May 2023.
Revised on: 17 August 2023.
Accepted on: 11 October 2023.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
http://reply.papertrans.cn/2/181/18050/18050-26.png
Submitted on: 24 July 2014.
Revised on: 14 November 2014.
Accepted on: 17 December 2014.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 18 May 2022.
Revised on: 20 August 2022.
Accepted on: 04 October 2022.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 29 January 2016.
Revised on: 28 April 2016.
Accepted on: 21 May 2016.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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