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Submitted on: 13 October 2011.
Revised on: 18 December 2011.
Accepted on: 07 February 2012.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 16 November 2013.
Revised on: 03 March 2014.
Accepted on: 16 April 2014.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 14 October 2002.
Revised on: 25 December 2002.
Accepted on: 18 February 2003.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 21 November 2006.
Revised on: 08 February 2007.
Accepted on: 07 March 2007.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 19 April 2016.
Revised on: 19 May 2016.
Accepted on: 22 June 2016.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING