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http://reply.papertrans.cn/2/181/18049/18049-32.png
Submitted on: 15 December 2010.
Revised on: 25 February 2011.
Accepted on: 08 April 2011.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 26 April 2009.
Revised on: 06 June 2009.
Accepted on: 22 July 2009.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 31 August 2020.
Revised on: 27 September 2020.
Accepted on: 18 November 2020.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING