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Submitted on: 04 January 2022.
Revised on: 17 February 2022.
Accepted on: 06 March 2022.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 16 April 2013.
Revised on: 28 June 2013.
Accepted on: 05 August 2013.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 17 April 2007.
Revised on: 23 June 2007.
Accepted on: 15 August 2007.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 25 May 2018.
Revised on: 18 August 2018.
Accepted on: 25 September 2018.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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