Submitted on: 28 June 2017.
Revised on: 12 August 2017.
Accepted on: 12 September 2017.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 19 June 2014.
Revised on: 02 October 2014.
Accepted on: 25 October 2014.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 04 November 2023.
Revised on: 10 February 2024.
Accepted on: 23 March 2024.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 29 October 2009.
Revised on: 13 January 2010.
Accepted on: 29 January 2010.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 08 April 2002.
Revised on: 08 May 2002.
Accepted on: 28 May 2002.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 10 February 2009.
Revised on: 16 April 2009.
Accepted on: 27 April 2009.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING