Submitted on: 08 September 2010.
Revised on: 12 October 2010.
Accepted on: 19 November 2010.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 03 March 2024.
Revised on: 26 June 2024.
Accepted on: 09 July 2024.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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