Submitted on: 26 February 2003.
Revised on: 24 April 2003.
Accepted on: 13 May 2003.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 09 June 2003.
Revised on: 12 August 2003.
Accepted on: 25 September 2003.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 04 February 2003.
Revised on: 04 March 2003.
Accepted on: 05 April 2003.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 17 May 2019.
Revised on: 26 July 2019.
Accepted on: 03 September 2019.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 29 March 2002.
Revised on: 20 May 2002.
Accepted on: 20 June 2002.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 27 November 2013.
Revised on: 14 January 2014.
Accepted on: 11 February 2014.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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