Submitted on: 30 December 2000.
Revised on: 10 March 2001.
Accepted on: 31 March 2001.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 12 August 1998.
Revised on: 12 September 1998.
Accepted on: 05 November 1998.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 02 May 2016.
Revised on: 31 July 2016.
Accepted on: 24 September 2016.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 13 March 2004.
Revised on: 04 May 2004.
Accepted on: 13 June 2004.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 04 December 2001.
Revised on: 06 February 2002.
Accepted on: 23 March 2002.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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