学术讨论会
发表于 2025-4-1 02:15:58
Benjamin Benz,Jürgen Boeckh,Hildegard Mogge-Grotjahn the mold, is different from a mask for photolithography. The template material and geometrical parameters directly affect the template deformation and the quality of transfer pattern. Alignment accuracy is determined by the mark pattern on the master; also, the pattern transfer resolution is affect
Coronary
发表于 2025-4-1 06:13:06
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