Pcos971 发表于 2025-3-28 16:03:52
http://reply.papertrans.cn/67/6610/660953/660953_41.png委托 发表于 2025-3-28 21:29:26
http://reply.papertrans.cn/67/6610/660953/660953_42.pngconcise 发表于 2025-3-29 02:15:40
Ultrasensitive In-Plane Resonant Nano-electromechanical Sensors,detection principle. The simplified NEM sensor consists of a clamped-clamped (CC) beam with two side electrodes, in-plane resonant NEM (IP-RNEM) sensor. Later, the IP-RNEM sensor is monolithically integrated with an in-plane field-effect-transistor (FET) to realize the in-plane resonant suspended galeft-ventricle 发表于 2025-3-29 06:31:06
10楼我要威胁 发表于 2025-3-29 09:57:31
10楼