不能平庸 发表于 2025-3-21 16:25:14
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Dimensional Metrology Using Mode-Locked Lasers, high spatial coherence, being suited to overcome the technical barriers long standing in 3-D profiling of rough surfaces. In summary, mode-locked lasers are now ready to lead the advance of dimensional metrology by providing unique temporal and spectral benefits over conventional continuous wave la轻打 发表于 2025-3-22 03:35:07
Nanopositioning and Nanomeasuring Machines,surement performance at the limits of physics and technology, resulting from the progress and the goals of modern high-tech fabrication technologies. The fundamentals of the nanopositioning and nanomeasuring machine, developed at the Institute of Process Measurement and Sensor Technology of the IlmeAFFIX 发表于 2025-3-22 08:13:15
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Optical Sensors for Machine Tool Metrology,ne tools are largely affected by these two principles. This is the second topic highlighted in this chapter. Some small and low-cost optical sensors for geometric error measurements are presented. These sensors can be portably mounted onto the machine frame for online measurement. They can also be emortuary 发表于 2025-3-22 16:53:47
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Micro-dimensional Measurement by a Micro-probing System,robe tip ball of the micro-probing systems is composed with the high-accuracy microsphere, so that their diameter is smaller than the micrometric features of the measuring workpiece generally in order to realize good accessibility for complex features. Therefore, precise qualification of the probe tLeft-Atrium 发表于 2025-3-23 05:00:53
Optical Scatterometry for Nanostructure Metrology,M in addressing devices with sub-wavelength feature sizes in semiconductor industry. This chapter aims to give the engineers and the graduates working in relevant fields some basic knowledge in optical scatterometry. Emphasis will be given to the two basic steps involved in the implementation of optVital-Signs 发表于 2025-3-23 07:52:55
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