毛发 发表于 2025-3-21 19:51:27
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0933-033X yscale lithography, resist thin films, and pattern transfer..This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, whinarcotic 发表于 2025-3-22 03:03:33
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Laser Heat-Mode Lithography on Transparent Thin Films,irectly fabricate the micro/nano-structures through traditional laser writing lithography because the laser energy cannot be absorbed due to the very low absorption coefficient of transparent thin films in writing laser wavelength.障碍物 发表于 2025-3-22 11:54:42
Laser Heat-Mode Grayscale Lithography,uctural change occurs when the temperature exceedscertain threshold. In this process, the interaction between laser and materials usually involves structural changes, such as crystallization, oxidization, melting, and solidification.爵士乐 发表于 2025-3-22 16:19:24
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0933-033X t size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advance978-981-15-0945-2978-981-15-0943-8Series ISSN 0933-033X Series E-ISSN 2196-2812黑豹 发表于 2025-3-23 00:01:00
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