令人发腻 发表于 2025-3-26 21:11:33

Electrical and Electron Microscope Studies of Boron Molecular Ion Implants into Silicond energy. In this study boron has been implanted from ion beams of B, BCl, Cl + B, BCl., BF, B + F and BF. at doses of 10.and 10. cm. with the energy of the boron atoms constant at 25 keV. The sheet resistance has been measured during isochronal annealing and significant differences are shown to exi

agnostic 发表于 2025-3-27 04:51:06

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傀儡 发表于 2025-3-27 08:24:30

Enhanced and Inhibited Oxidation of Implanted Silicong species investigated Ge, Si and Ga showed strong passivation. Passivation proved to be partly connected with presence of disordered layers, therefore, oxidation rates correlate well with lattice reordering. As in case of lattice reordering, correlation was found between oxide growth rate and subst

Ophthalmologist 发表于 2025-3-27 10:36:11

Defects Introduced into Silicon by Boron Implantation in the MeV Energy Rangesurements performed directly on the produced p-n junctions. These curves, analysed by the “delaying heating method”, are compared to those obtained for low energy implants. Levels located at E. -0.18, E. -0.42, E. +0.26, E. +0.32 eV are identified. They are quite the same as those observed for low e

CHIDE 发表于 2025-3-27 15:24:00

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万神殿 发表于 2025-3-27 20:16:06

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HEAVY 发表于 2025-3-27 23:12:18

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POLYP 发表于 2025-3-28 04:21:33

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florid 发表于 2025-3-28 09:39:05

Characteristics of Implanted N-Type Profiles in GaAs Annealed in a Controlled Atmosphere a flowing hydrogen-arsenic atmosphere is adjusted to he near equilibrium with the surface of the implanted GaAs during the heat treatment. The CAT anneal was used to study the characteristics of n-type impurities (Si and S), random implanted at room temperature into GaAs epitaxial layers. In situ i

eulogize 发表于 2025-3-28 12:07:29

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查看完整版本: Titlebook: Ion Implantation in Semiconductors 1976; Fred Chernow,James A. Borders,David K. Brice Book 1977 Plenum Press, New York 1977 Plantation.cor