JOT 发表于 2025-3-23 11:28:07
Applications of Electron Beam Lithography to Integrated Optics1.5 microns, stripe guides have widths between 2 and 8 microns and to ensure low scattering losses must have very smooth edges (0.1μm or better for spatial frequencies between 0.1 and 10μm.). Compared with patterns used in integrated electronic circuits, the ones employed in integrated optics are sp死亡率 发表于 2025-3-23 16:20:44
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Laser Beam Photolithographic System for Integrated Optics ApplicationsA photolithographic system was operated based on direct laser beam explosure of photoresist films. Lineshape dependence on various fabrication parameters is reported.果核 发表于 2025-3-25 03:00:49
Laser Induced Chemical Vapor Deposition of Metals for Electrical Contacts in Semiconductor ProcessinPyrolytic and photolytic laser chemical vapor deposition of copper, platinum, gallium and tin is studied for the production of low resistance ohmic contacts of very small dimensions.