磨坊 发表于 2025-3-26 22:33:19
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David I. Macleodr design and optimization for multiscale process systems not.Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semicondDensity 发表于 2025-3-27 19:36:49
http://reply.papertrans.cn/47/4648/464738/464738_36.pngwall-stress 发表于 2025-3-28 01:07:50
David I. Macleodperation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly coupled macroscopic and microscopic phenomena. Drawing from recent advances in the dynamics and control of distributed parameter processes for which contin协定 发表于 2025-3-28 03:34:24
David I. Macleodperation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly coupled macroscopic and microscopic phenomena. Drawing from recent advances in the dynamics and control of distributed parameter processes for which continaccrete 发表于 2025-3-28 07:34:41
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