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Submitted on: 30 April 2003.
Revised on: 01 June 2003.
Accepted on: 25 June 2003.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Submitted on: 12 February 2011.
Revised on: 25 March 2011.
Accepted on: 08 April 2011.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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Submitted on: 20 April 2022.
Revised on: 27 May 2022.
Accepted on: 05 June 2022.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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Submitted on: 09 July 2015.
Revised on: 22 August 2015.
Accepted on: 11 September 2015.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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