Submitted on: 15 May 2012.
Revised on: 05 July 2012.
Accepted on: 26 July 2012.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 23 March 2010.
Revised on: 10 May 2010.
Accepted on: 30 June 2010.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
http://reply.papertrans.cn/2/181/18043/18043-34.png
Submitted on: 28 July 2009.
Revised on: 19 September 2009.
Accepted on: 24 October 2009.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 12 July 2021.
Revised on: 04 August 2021.
Accepted on: 16 August 2021.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS