Submitted on: 25 May 2018.
Revised on: 15 September 2018.
Accepted on: 29 October 2018.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 01 January 2019.
Revised on: 15 March 2019.
Accepted on: 31 March 2019.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 20 February 2023.
Revised on: 08 June 2023.
Accepted on: 27 July 2023.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 07 November 2008.
Revised on: 04 February 2009.
Accepted on: 02 April 2009.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 29 May 2007.
Revised on: 16 July 2007.
Accepted on: 29 July 2007.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 01 January 2018.
Revised on: 19 February 2018.
Accepted on: 02 March 2018.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 09 September 2022.
Revised on: 01 November 2022.
Accepted on: 05 December 2022.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS