Submitted on: 02 November 2006.
Revised on: 27 December 2006.
Accepted on: 01 February 2007.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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Submitted on: 01 June 2014.
Revised on: 13 September 2014.
Accepted on: 12 October 2014.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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http://reply.papertrans.cn/2/121/12076/12076-25.png
Submitted on: 04 October 2008.
Revised on: 05 November 2008.
Accepted on: 29 November 2008.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Submitted on: 03 June 2015.
Revised on: 12 August 2015.
Accepted on: 29 August 2015.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Submitted on: 22 January 2001.
Revised on: 09 May 2001.
Accepted on: 04 June 2001.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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Submitted on: 29 August 2022.
Revised on: 14 October 2022.
Accepted on: 09 November 2022.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING