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Submitted on: 13 July 2004.
Revised on: 27 October 2004.
Accepted on: 04 December 2004.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Submitted on: 14 September 2005.
Revised on: 22 November 2005.
Accepted on: 07 January 2006.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Submitted on: 12 February 1998.
Revised on: 09 June 1998.
Accepted on: 29 July 1998.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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Submitted on: 17 March 2008.
Revised on: 14 May 2008.
Accepted on: 17 June 2008.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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Submitted on: 25 October 2017.
Revised on: 06 December 2017.
Accepted on: 08 January 2018.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING