单色 发表于 2025-3-23 13:02:14
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Rainer Gottlob M. D.,Robert May M. D.portant as their use is their abatement (.), since gases like SF. or some perfluorocarbons are potent greenhouse gases. The above processes require that at some stage the gas be subjected to discharge conditions, which are nowadays optimized by previous modeling and process simulation, which in turn蚀刻术 发表于 2025-3-24 11:09:55
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ven by the electron drift velocity .. in an electric field . by the relation μ. = .. — multiplied by the gas density . is a universal function of the reduced field ., i. e. independent of the gas density. At higher densities in a number of gases anomalous density effects have been observed [1, 2, 3,Evolve 发表于 2025-3-24 22:50:11
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