FECT
发表于 2025-4-1 03:20:09
Bo Lu,TaiXue Bei,Zhiwei Meng,Ying Luo,Lei Zhao,Nan Xu,Jianhua Liu,Fayi Yannd reliable piezoelectric thin films have limited the incorporation of piezoelectric thin films in MEMS. Advances in materials processing and a move toward system-in-package (SIP) concepts have pushed piezoelectric thin film devices toward mainstream acceptance. The advances in piezoelectric aluminu