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Technological Basis of Bulk-Silicon-Microtechnique,
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Shape and Functional Elements of the Bulk Silicon MicrotechniqueA Manual of Wet-Etch
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Shape and Functional Elements of the Bulk Silicon Microtechnique978-3-540-26876-5
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ed and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection o
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