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978-1-4612-7857-3Plenum Press, New York 1989tenuous 发表于 2025-3-22 13:21:37
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Rapid Thermal Annealing - Theory and Practice,lved, and because the indirect method of heating the wafer results in large thermal gradients and plastic deformation (slip) if rapid heating is attempted. This disadvantage has become significant in recent years because the reduced thermal processing required by modern smallgeometry processes canno