CHOP 发表于 2025-3-25 04:46:01
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Nanofabrication by Focused Ion Beam,f both features are explained and four typical usages of FIB are presented, including FIB inspecting and editing integrated circuits, repairing photomasks, preparing TEM/STEM samples, and nanostructuring for scientific research.Bmd955 发表于 2025-3-25 20:41:33
Nanoscale Pattern Transfer by Etching,as loading, trenching, notching, micromasking effects, etc. Other novel etching techniques such as metal assisted chemical etching (MACE) and atomic layer etching (ALE) are also presented. Finally, physical etching by ion milling is described.Neolithic 发表于 2025-3-26 02:07:05
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https://doi.org/10.1007/978-3-031-62546-6Additive nanomanufacturing; Electron beam lithography; Indirect nanofabrication; Microfabrication; NanofCOUCH 发表于 2025-3-26 16:57:29
Zheng CuiContains most of the nanofabrication techniques encountered in both industrial applications and scientific research.Presents less theoretical and more practical information and examples from the autho