纬线
发表于 2025-3-23 11:49:31
Electron Beam Lithography,Over the past decade, the trend in integrated circuits for computers always has been a doubling of the circuit density every year. To-day’s products have 64.000 memory cells or 700 logic circuits on a 5 × 5 mm. sized chip. For to-morrow, we can expect 288.000 and 516.000 memory cells or 5000 logic circuits on a chip.
极少
发表于 2025-3-23 16:00:19
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指派
发表于 2025-3-23 21:47:26
Limitations of Digital Electronics,es of this technology were improved several orders of magnitude. This holds especially for the integration density, the power dissipation, the performance, the reliability, and — last not least — the cost per function.
modifier
发表于 2025-3-23 22:12:47
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EXULT
发表于 2025-3-24 03:31:35
The IBM Research Symposia Serieshttp://image.papertrans.cn/m/image/632215.jpg
Limousine
发表于 2025-3-24 09:03:53
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指令
发表于 2025-3-24 14:33:03
Recent Advances in the Theory of Impurities and Defects in Semiconductors,ented technologists. In my talk, I shall review a number of recent advances in my field of expertise, with an attempt to place them in a perspective relating to technology in general and microelectronics in particular. Since time is limited, I will not attempt a broad review. Instead, I will focus p
失望昨天
发表于 2025-3-24 15:54:08
Photolithography and X-ray Lithography,be somewhat higher; it seems possible that this will be in the range of 1 µm..In order to realize a production process to generate sub-µm structures, X-ray lithography is the most promising approach. X-ray lithography at wavelengths between 0.5 and 5 nm is a simple one-to-one shadow-projection proce
失望未来
发表于 2025-3-24 21:50:46
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违抗
发表于 2025-3-25 00:10:17
Lithographic Materials,iconductor processing concepts. They have survived the change over from wet chemistry etchants to dry plasma etching, and from visible light exposure to UV or electron beam lithography. More specialized resist systems have since been identified but the traditional performers impress by their univers