cathartic 发表于 2025-3-30 12:17:15

Numerical Case Studies: Forward Problems,Electrostatic micromotors were the first MEMS which had been designed and prototyped exploiting Silicon integrated technology.

Affectation 发表于 2025-3-30 15:20:46

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查看完整版本: Titlebook: MEMS: Field Models and Optimal Design; Paolo Di Barba,Slawomir Wiak Book 2020 Springer Nature Switzerland AG 2020 Maxwell’s equations.Fini