滑动 发表于 2025-3-28 17:07:09
http://reply.papertrans.cn/59/5892/589114/589114_41.pngMotilin 发表于 2025-3-28 20:04:20
The Depth Distribution of Phosphorus Ions Implanted into Silicon Crystals shown that none of them accounts satisfactorily for the tail, which develops during the implantation process and is not thermally activated. A channelling mechanism is therefore favoured as the cause of the tail.