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Akio Saiura,Junji Yamamotoer, smaller form factor, increasingly divergent process ?ows, and functional diversi?cation would seem to make 3D technologies a natural choice for most of the semiconductor industry. Since the concept of verti978-1-4419-4562-4978-0-387-76534-1Series ISSN 1558-9412 Series E-ISSN 1558-9420