自传 发表于 2025-3-26 21:57:37
Springer Series in Materials Sciencehttp://image.papertrans.cn/c/image/224499.jpg我说不重要 发表于 2025-3-27 02:44:35
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Chemical-Mechanical Planarization of Semiconductor Materials散布 发表于 2025-3-28 04:39:39
Metal Polishing Processes,ade for interconnections between wires and the substrate and between the wires themselves. Indeed, in the case of complex devices such as microprocessors or sophisticated logic circuits, several layers of both horizontally and vertically interconnected damascene structures must be fabricated to formCOLIC 发表于 2025-3-28 06:29:59
Metal CMP Science,ediately oxidizes. The abrasion-passivation process is hypothesized to continue until a material that does not passivate and/or does not lend itself to mechanical abrasion (a stop layer) is reached. This mechanism requires that all tungsten removed be in an oxidized state.Aggressive 发表于 2025-3-28 13:20:27
Equipment Used in CMP Processes,as enabled the use of CMP processes consistent with high volume manufacturing in a clean room environment. Going forward, automated process control for CMP will lead to further improvements in manufacturability, stability and predictive process results.