Submitted on: 07 May 2002.
Revised on: 22 May 2002.
Accepted on: 18 June 2002.
Microsystems & Nanoengineering
http://reply.papertrans.cn/3/220/21968/21968-22.png
http://reply.papertrans.cn/3/220/21968/21968-23.png
Submitted on: 27 February 2015.
Revised on: 02 April 2015.
Accepted on: 07 April 2015.
Microsystems & Nanoengineering
http://reply.papertrans.cn/3/220/21968/21968-25.png
http://reply.papertrans.cn/3/220/21968/21968-26.png
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Submitted on: 11 February 2024.
Revised on: 18 February 2024.
Accepted on: 24 February 2024.
Microsystems & Nanoengineering
Submitted on: 04 January 2014.
Revised on: 29 January 2014.
Accepted on: 15 February 2014.
Microsystems & Nanoengineering
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