http://reply.papertrans.cn/3/220/21967/21967-21.png
Submitted on: 15 June 2012.
Revised on: 22 July 2012.
Accepted on: 16 August 2012.
Microsystems & Nanoengineering
http://reply.papertrans.cn/3/220/21967/21967-23.png
Submitted on: 03 July 2005.
Revised on: 13 July 2005.
Accepted on: 07 August 2005.
Microsystems & Nanoengineering
Submitted on: 02 September 2014.
Revised on: 14 October 2014.
Accepted on: 24 October 2014.
Microsystems & Nanoengineering
http://reply.papertrans.cn/3/220/21967/21967-26.png
Submitted on: 29 May 2022.
Revised on: 05 July 2022.
Accepted on: 20 July 2022.
Microsystems & Nanoengineering
http://reply.papertrans.cn/3/220/21967/21967-28.png
Submitted on: 13 August 2010.
Revised on: 06 September 2010.
Accepted on: 28 September 2010.
Microsystems & Nanoengineering
Submitted on: 27 November 2002.
Revised on: 26 December 2002.
Accepted on: 21 January 2003.
Microsystems & Nanoengineering