http://reply.papertrans.cn/3/220/21927/21927-11.png
http://reply.papertrans.cn/3/220/21927/21927-12.png
Submitted on: 04 December 2013.
Revised on: 12 January 2014.
Accepted on: 04 February 2014.
MICROELECTRONIC ENGINEERING---ELSEVIER
Submitted on: 11 August 2015.
Revised on: 13 September 2015.
Accepted on: 10 October 2015.
MICROELECTRONIC ENGINEERING---ELSEVIER
http://reply.papertrans.cn/3/220/21927/21927-15.png
http://reply.papertrans.cn/3/220/21927/21927-16.png
Submitted on: 13 May 2007.
Revised on: 20 June 2007.
Accepted on: 29 June 2007.
MICROELECTRONIC ENGINEERING
http://reply.papertrans.cn/3/220/21927/21927-18.png
http://reply.papertrans.cn/3/220/21927/21927-19.png
Submitted on: 27 April 2015.
Revised on: 27 May 2015.
Accepted on: 21 June 2015.
MICROELECTRONIC ENGINEERING