Submitted on: 13 December 2013.
Revised on: 25 January 2014.
Accepted on: 19 February 2014.
MICROELECTRONIC ENGINEERING---ELSEVIER
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Submitted on: 27 June 2009.
Revised on: 06 August 2009.
Accepted on: 02 September 2009.
MICROELECTRONIC ENGINEERING---ELSEVIER
Submitted on: 28 September 2011.
Revised on: 28 October 2011.
Accepted on: 21 November 2011.
MICROELECTRONIC ENGINEERING
Submitted on: 29 July 2005.
Revised on: 07 August 2005.
Accepted on: 03 September 2005.
MICROELECTRONIC ENGINEERING
Submitted on: 20 October 2005.
Revised on: 23 November 2005.
Accepted on: 09 December 2005.
MICROELECTRONIC ENGINEERING---ELSEVIER
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