Submitted on: 02 November 2012.
Revised on: 23 November 2012.
Accepted on: 01 December 2012.
MICROELECTRONIC ENGINEERING---ELSEVIER
Submitted on: 18 May 2001.
Revised on: 05 June 2001.
Accepted on: 15 June 2001.
MICROELECTRONIC ENGINEERING---ELSEVIER
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Submitted on: 11 November 2020.
Revised on: 19 December 2020.
Accepted on: 24 December 2020.
MICROELECTRONIC ENGINEERING---ELSEVIER
Submitted on: 23 March 2005.
Revised on: 19 April 2005.
Accepted on: 12 May 2005.
MICROELECTRONIC ENGINEERING
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