http://reply.papertrans.cn/3/220/21924/21924-11.png
Submitted on: 13 December 2017.
Revised on: 22 January 2018.
Accepted on: 16 February 2018.
MICROELECTRONIC ENGINEERING
http://reply.papertrans.cn/3/220/21924/21924-13.png
Submitted on: 01 May 2020.
Revised on: 18 May 2020.
Accepted on: 14 June 2020.
MICROELECTRONIC ENGINEERING---ELSEVIER
Submitted on: 25 July 2021.
Revised on: 27 August 2021.
Accepted on: 17 September 2021.
MICROELECTRONIC ENGINEERING
Submitted on: 05 April 2006.
Revised on: 05 May 2006.
Accepted on: 31 May 2006.
MICROELECTRONIC ENGINEERING---ELSEVIER
Submitted on: 18 July 2017.
Revised on: 15 August 2017.
Accepted on: 08 September 2017.
MICROELECTRONIC ENGINEERING
http://reply.papertrans.cn/3/220/21924/21924-18.png
http://reply.papertrans.cn/3/220/21924/21924-19.png
Submitted on: 16 July 2021.
Revised on: 28 July 2021.
Accepted on: 17 August 2021.
MICROELECTRONIC ENGINEERING