Submitted on: 28 October 2021.
Revised on: 22 November 2021.
Accepted on: 04 December 2021.
Micro and Nano Engineering---ELSEVIER
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Submitted on: 12 October 2009.
Revised on: 05 November 2009.
Accepted on: 26 November 2009.
Micro and Nano Engineering---ELSEVIER
http://reply.papertrans.cn/3/219/21877/21877-14.png
Submitted on: 21 May 2019.
Revised on: 20 June 2019.
Accepted on: 30 June 2019.
NULL
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Submitted on: 06 September 2023.
Revised on: 27 September 2023.
Accepted on: 17 October 2023.
NULL
Submitted on: 10 April 2000.
Revised on: 24 May 2000.
Accepted on: 08 June 2000.
NULL
Submitted on: 30 April 2013.
Revised on: 06 June 2013.
Accepted on: 19 June 2013.
Micro and Nano Engineering---ELSEVIER
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