http://reply.papertrans.cn/3/201/20047/20047-31.png
http://reply.papertrans.cn/3/201/20047/20047-32.png
Submitted on: 12 September 2021.
Revised on: 09 October 2021.
Accepted on: 29 October 2021.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
http://reply.papertrans.cn/3/201/20047/20047-34.png
http://reply.papertrans.cn/3/201/20047/20047-35.png
Submitted on: 01 January 2023.
Revised on: 29 January 2023.
Accepted on: 10 February 2023.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B