Submitted on: 11 February 2000.
Revised on: 23 May 2000.
Accepted on: 11 July 2000.
___________________Journal of Micro-Nanopatterning Materials and Metrology-JM3
Submitted on: 20 June 2023.
Revised on: 14 July 2023.
Accepted on: 15 August 2023.
___________________Journal of Micro-Nanopatterning Materials and Metrology-JM3
Submitted on: 23 August 2001.
Revised on: 01 December 2001.
Accepted on: 04 January 2002.
___________________Journal of Micro-Nanopatterning Materials and Metrology-JM3
Submitted on: 16 May 2012.
Revised on: 25 August 2012.
Accepted on: 12 October 2012.
___________________Journal of Micro-Nanopatterning Materials and Metrology-JM3
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Submitted on: 29 September 2019.
Revised on: 12 January 2020.
Accepted on: 21 February 2020.
___________________Journal of Micro-Nanopatterning Materials and Metrology-JM3
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Submitted on: 29 April 2016.
Revised on: 15 August 2016.
Accepted on: 11 September 2016.
___________________Journal of Micro-Nanopatterning Materials and Metrology-JM3
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