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https://doi.org/10.1007/978-3-476-03256-0ntieth century that paved the way to modern physics and our conception of matter. From fundamental research in nuclear physics, RBS developed into a very useful material characterization technique for investigation of thin film composition, depth profiling of impurities, and thickness measurement inPalter 发表于 2025-3-27 06:41:42
https://doi.org/10.1007/978-3-476-03256-0lity for detection of low concentrations of practically any element of the periodic table with large spatial resolution. At present time SIMS is a primary tool used in both industry and research areas and also highly relevant for analysis of nano-scaled materials. However, SIMS is a quite complicateintegral 发表于 2025-3-27 12:22:11
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https://doi.org/10.1007/978-3-476-03256-0 that the main types of modern SIMS instruments are reviewed, describing the different primary ion sources and the variety of mass spectrometers for detecting secondary ions. Finally, the main operation modes of SIMS instruments are described in conjunction with examples of SIMS applications with cocountenance 发表于 2025-3-28 14:05:12
Deutsche Einheit: Ein neuer Diskurs diffraction limit, allows near-field based techniques to obtain sample information with a high spatial resolution. In this chapter basic principles, operation modes, and standard equipment for this method are discussed. Examples of applications to the nano- and micro-scale materials illustrate how