Submitted on: 19 August 2009.
Revised on: 20 October 2009.
Accepted on: 05 December 2009.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Submitted on: 23 January 2005.
Revised on: 08 May 2005.
Accepted on: 25 May 2005.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Submitted on: 20 November 1998.
Revised on: 12 March 1999.
Accepted on: 25 March 1999.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Submitted on: 30 June 2004.
Revised on: 28 September 2004.
Accepted on: 11 November 2004.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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Submitted on: 16 December 2020.
Revised on: 10 January 2021.
Accepted on: 02 March 2021.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Submitted on: 21 April 2015.
Revised on: 12 May 2015.
Accepted on: 23 May 2015.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
http://reply.papertrans.cn/2/121/12075/12075-18.png
Submitted on: 04 April 2007.
Revised on: 31 July 2007.
Accepted on: 14 August 2007.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Submitted on: 30 April 2019.
Revised on: 23 July 2019.
Accepted on: 30 August 2019.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING