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Submitted on: 11 August 2003.
Revised on: 25 October 2003.
Accepted on: 25 November 2003.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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Submitted on: 12 March 2017.
Revised on: 22 April 2017.
Accepted on: 28 May 2017.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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Submitted on: 06 March 2010.
Revised on: 13 June 2010.
Accepted on: 06 July 2010.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Submitted on: 12 November 2019.
Revised on: 30 January 2020.
Accepted on: 25 February 2020.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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