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Submitted on: 20 December 2004.
Revised on: 28 March 2005.
Accepted on: 22 April 2005.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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Submitted on: 07 July 2022.
Revised on: 07 August 2022.
Accepted on: 01 September 2022.
___________________IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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